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Matrix Bobcat 209S

  • Street: 380 Tennant Ave
  • City: Morgan Hill
  • State: California
  • Country: United States
  • Zip/Postal Code: 95037
  • Listed: March 21, 2017 11:54 pm
  • Expires: 9267 days, 1 hour
Matrix Bobcat 209S Asher-10235 -3


Model: Matrix Bobcat 209S  Microwave Plasma Asher semiconductor process equipment

Category:  Plasma Asher Plasma Descum

Original Equipment Manufacturer: Matrix Integrated Systems, Inc

Condition: Refurbished by seller

Vintage: 2001

S/N: 10235

Wafer Size: 8 inch configuration.

Valid Time: Subject to prior sale

Lead Time: 12 weeks

Location: Silicon Valley, CA, U.S.A.

Warranty: 12 months non-consumable parts.

Installation and training: Available at extra charge

Service Contract: Available at extra charge

Matrix Bobcat 209S plasma Asher Plasma descum semiconductor equipment General Description


 Asher Component Details
Type Standalone
Model Bobcat 209S
How Many? 1
Type RIE
Process (e.g., Ash, Clean, Light Etch) Photo Resist, SU8 strip
Load Locks/Load Plate
Open Cassette or SMIF Open Cassette
How Many? 1
How Many? 1
Method of Transport Transfer Unit
Make/Models Rorze RR701
RF Generators
How Many? 2
Make/Models Comdel FP3111R2 600 W, Microwave generator 3000W
Gas Box
Gases used per chamber 3
Idenfity gases O2, N2, None
MFC’s used (Make/Model) MKS 1000sccm, 300sccm, 1000sccm
Control System
PC or Control Rack? PC
Software Type and Version Windows NT

Price: Contact 

Valid Time: Subject to prior sale


Listing ID: 92758d21f5577d27

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