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GaSonics PEP-4800DL 200mm PEP Iridia DL Plasma Asher Dual Chamber System

  • Listed: October 31, 2019 3:03 pm
  • Expires: 9744 days, 20 hours

Description

GaSonics PEP-4800DL 200mm PEP Iridia DL Plasma Asher Dual Chamber System.
Part No: PEP-4800DL
Configured for 200mm Wafers
Dual Cooling Stations
Through-the-Wall Installation

System Includes

Wafer Handler Module

Part No: PEP-4800DL(H)
Build Configuration: 95-0526
Processes Controller Computer Part No: 94-2818, IBM 7587 w/CD-ROM
Kensington Robot Part No: DUAL MULTI-LINK
Kensington Robot Controller Part No: 4000C
Cooling Station Part No: 95-0533 (Qty. 2)
Input: 208VAC, 60Hz, 3Phase WYE, 30A
Left Chamber

Part No: PEP-4800DL(L)
Build Configuration: 51-2035
Diagram No: 98-3308
Processes Controller Computer Part No: 94-2819, IBM 7587
ASTeX 1.8kW Power Supply Part No: D13765
ENI RF Generator Part No: ACG-5XL, 61-2337
Gas Configuration: CF4, N2, 4 percent H2/N2, O2, CF4, N2
Right Chamber

Part No: PEP-4800DL(R)
Build Configuration: 51-2036
Diagram No: 98-3308
Processes Controller Computer Part No: 94-2819, IBM 7587
ASTeX 1.8kW Power Supply Part No: D13765
ENI RF Generator Part No: ACG-5XL, ACG-5-01M14
Gas Configuration: CF4, CF4, N2, CDA, N2, O2, 4 percent H2/N2.
Power Box

Part No: PEP.IRIDIA
Build Configuration: 95-3733
Diagram No: 98-3374
95-3733

Listing ID: 5885dbb58d43c9df

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