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STS Mutiplex Cluster Three Chamber

  • Street: 380 Tennant Ave
  • City: Morgan Hill
  • State: California
  • Country: United States
  • Zip/Postal Code: 95037
  • Listed: March 18, 2017 9:25 pm
  • Expires: 99595 days, 12 hours
STS Mutiplex Cluster ICP -Asher- Three Chamber

Description

Model STS Mutiplex Cluster 

Category:  Used Equipment List – Etch RIE ICP

Original Equipment Manufacturer: Surface Tech Sys ( STS )

Condition: In warehouse, Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.

Valid Time: Subject to prior sale

Lead Time: Ready to go. 12 to 16 weeks for the Refurbished and fully tested condition.

Location: Asia

Warranty: No warranty for the AS IS,WHERE IS condition. 3 months for the Refurbished and fully tested condition.

Installation and training: Available at extra charge for the Refurbished and fully tested condition

Service Contract: Available at extra charge for the Refurbished and fully tested condition

Surface Tech Sys (STS)  STS Mutiplex Cluster  Description:

STS Multiplex Cluster ICP Etcher, 8″
Brooks VCE4 and Mtr5 robot
Turbo on the wafer handler
C033 Cluster handler
(2) Temperature controlled lids
Loadlock: Brooks VCE 4 with manual door
Corema chiller on Metal ICP chamber
ICP chamber (Metal etch)
12 process gas manifold
Bias capabilities
Chuck: heat exchanger, no electric
Turbo pumps: TMH100
ICP chamber(Dielectric Etch)
12 process gas manifold
Bias capabilities
Processed: silicon etch
Chuck: heat exchanger, no electric
Turbo pump: TMH100
ICT chamber (Asher / Stripper)
4 gases: N2, O2, NH3, CF4
Turbo pump
NOAH chillers
Vacuum Pumps are not included

Price: Contact 

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Listing ID: 81058ce071531639

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